For Full-Text PDF, please login, if you are a member of IEICE,|
or go to Pay Per View on menu list, if you are a nonmember of IEICE.
Thermodynamical Calculation of Transport Rate of GaSb in a Closed Tube Vapor Phase Growth System
Noboru KITAMURA Takao WADA
IEICE TRANSACTIONS (1976-1990)
Publication Date: 1990/08/25
Print ISSN: 0000-0000
Type of Manuscript: LETTER
Category: Semiconductor Materials and Devices
Full Text: PDF(183.5KB)>>
Transport rate of GaSb in a closed tube vapor phase growth system with iodine as a transport agent was calculated thermodynamically. The calculated maximum transport rate was obtained at iodine density of 0.01-0.02 mg/cm3 in the growth temperature range of 550-600. The calculation was compared with the experimental result of GaSb. The calculated iodine density at which the maximum transport rate was obtained showed a good agreement with the experiment.