Thermodynamical Calculation of Transport Rate of GaSb in a Closed Tube Vapor Phase Growth System

Noboru KITAMURA  Takao WADA  

IEICE TRANSACTIONS (1976-1990)   Vol.E73   No.8   pp.1335-1337
Publication Date: 1990/08/25
Online ISSN: 
Print ISSN: 0000-0000
Type of Manuscript: LETTER
Category: Semiconductor Materials and Devices

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Transport rate of GaSb in a closed tube vapor phase growth system with iodine as a transport agent was calculated thermodynamically. The calculated maximum transport rate was obtained at iodine density of 0.01-0.02 mg/cm3 in the growth temperature range of 550-600. The calculation was compared with the experimental result of GaSb. The calculated iodine density at which the maximum transport rate was obtained showed a good agreement with the experiment.