Superconducting Y-Ba-Cu Oxide Films as-Grown by RF Diode Sputtering

Mikihiro WATANABE  Atsushi MATACHI  Teruo ISHIBASHI  Atsushi NOYA  Shinya KURIKI  

IEICE TRANSACTIONS (1976-1990)   Vol.E71   No.4   pp.283-285
Publication Date: 1988/04/25
Online ISSN: 
Print ISSN: 0000-0000
Type of Manuscript: Special Section LETTER (Special Issue: Papers from 1988 Spring Convention IEICE)
Category: Superconductivity Electronics

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Y-Ba-Cu-O films sputter-deposited at about 650 in high oxygen concentration gas are superconductive without heat treatment after the deposition. The films of 700 nm thickness have Tc end of 72 K on SrTiO3 and 65 K on sapphire substrates. Reduced interdiffusion, compared with post-annealed films at high temperatures, between the film and the substrate is confirmed.