An AES Study on the Anodization of Al/Mo/Al Multilayer Films

Atsushi NOYA  Katsutaka SASAKI  Toshiji UMEZAWA  Tsuyoshi DOBASHI  

Publication
IEICE TRANSACTIONS (1976-1990)   Vol.E71   No.4   pp.266-267
Publication Date: 1988/04/25
Online ISSN: 
DOI: 
Print ISSN: 0000-0000
Type of Manuscript: Special Section LETTER (Special Issue: Papers from 1988 Spring Convention IEICE)
Category: Components and Materials
Keyword: 


Full Text: PDF(147KB)>>
Buy this Article




Summary: 
Anodization behavior of Al/Mo/Al multilayer films is studied by the method of depth profiling with Auger electron spectroscopy. The leaving out of the molybdenum layer by the drastic transport is observed. The results are discussed on the basis of the mobility of molybdenum cations.