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An AES Study on the Anodization of Al/Mo/Al Multilayer Films
Atsushi NOYA Katsutaka SASAKI Toshiji UMEZAWA Tsuyoshi DOBASHI
IEICE TRANSACTIONS (1976-1990)
Publication Date: 1988/04/25
Print ISSN: 0000-0000
Type of Manuscript: Special Section LETTER (Special Issue: Papers from 1988 Spring Convention IEICE)
Category: Components and Materials
Full Text: PDF(147KB)>>
Anodization behavior of Al/Mo/Al multilayer films is studied by the method of depth profiling with Auger electron spectroscopy. The leaving out of the molybdenum layer by the drastic transport is observed. The results are discussed on the basis of the mobility of molybdenum cations.