Reduction of Anodization Voltage in Hafnium Oxide Thin Film Capacitors

Atushi NOYA  Toshiji UMEZAWA  

Publication
IEICE TRANSACTIONS (1976-1990)   Vol.E69   No.6   pp.716-718
Publication Date: 1986/06/25
Online ISSN: 
DOI: 
Print ISSN: 0000-0000
Type of Manuscript: LETTER
Category: Components
Keyword: 


Full Text: PDF(189.6KB)>>
Buy this Article




Summary: 
We have successfully prepared low anodization voltage high-quality capacitors using anodized hafnium films with the anodization voltage of 40 V under the preferable conditions of anodization and heat-treatment.