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Reduction of Anodization Voltage in Hafnium Oxide Thin Film Capacitors
Atushi NOYA Toshiji UMEZAWA
IEICE TRANSACTIONS (1976-1990)
Publication Date: 1986/06/25
Print ISSN: 0000-0000
Type of Manuscript: LETTER
Full Text: PDF(189.6KB)>>
We have successfully prepared low anodization voltage high-quality capacitors using anodized hafnium films with the anodization voltage of 40 V under the preferable conditions of anodization and heat-treatment.