Magnetic-Field Dependent Electron Transport of Fe3Si Nanodots

Jialin WU
Katsunori MAKIHARA
Hai ZHANG
Noriyuki TAOKA
Akio OHTA
Seiichi MIYAZAKI

Publication
IEICE TRANSACTIONS on Electronics   Vol.E105-C    No.10    pp.616-621
Publication Date: 2022/10/01
Publicized: 2022/04/21
Online ISSN: 1745-1353
DOI: 10.1587/transele.2021FUP0007
Type of Manuscript: Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
Category: 
Keyword: 
nanodots,  Fe-silicide,  hydrogen plasma,  

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Summary: 
We fabricated Fe-silicide nanodots (NDs) on an ultrathin SiO2 layer and evaluated changes in electron transport properties with and without magnetic field application. High-density NDs with an areal density as high as ∼1011cm-2 were formed on thermally grown SiO2 by exposing ultrathin Fe/Si-NDs structures to a remote H2 plasma without external heating. In electron transport properties related to current-time characteristics for a diode with Fe electrode and charging energy to NDs, clear changes in current levels through NDs and electron injection modulation of NDs depending on intensity of magnetic fields were observed.