Electro-Optic Modulator Based on Photolithography Fabricated p-i-n Integrated Photonic Crystal Nanocavity

Nurul Ashikin Binti DAUD  Yuta OOKA  Tomohisa TABATA  Tomohiro TETSUMOTO  Takasumi TANABE  

IEICE TRANSACTIONS on Electronics   Vol.E100-C   No.8   pp.670-674
Publication Date: 2017/08/01
Online ISSN: 1745-1353
DOI: 10.1587/transele.E100.C.670
Type of Manuscript: PAPER
Category: Optoelectronics
photonic crystal,  electro-optic devices,  integrated optics,  modulators,  nanophotonics,  opto-electronics,  

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We present the first demonstration of an electro-optic modulator based on a photolithographically fabricated photonic crystal (PhC) nanocavity with a p-i-n junction with SiO2 cladding. We show that the device exhibits an ultrahigh quality factor (Q∼105) and allow us to demonstrate electro-optic modulation through the integrated p-i-n diode structure. We demonstrate an electro-optic modulation based on the carrier injection.