Evaluation of Device Parameters for Membrane Lasers on Si Fabricated with Active-Layer Bonding Followed by Epitaxial Growth

Takuro FUJII  Koji TAKEDA  Erina KANNO  Koichi HASEBE  Hidetaka NISHI  Tsuyoshi YAMAMOTO  Takaaki KAKITSUKA  Shinji MATSUO  

IEICE TRANSACTIONS on Electronics   Vol.E100-C   No.2   pp.196-203
Publication Date: 2017/02/01
Online ISSN: 1745-1353
DOI: 10.1587/transele.E100.C.196
Type of Manuscript: Special Section PAPER (Special Section on Fabrication Technologies Supporting the Photonic/Nanostructure Devices)
epitaxial growth,  direct bonding,  membrane lasers,  silicon photonics,  

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We have developed membrane distributed Bragg reflector (DBR) lasers on thermally oxidized Si substrate (SiO2/Si substrate) to evaluate the parameters of the on-Si lasers we have been developing. The lasers have InGaAsP-based multi-quantum wells (MQWs) grown on InP substrate. We used direct bonding to transfer this active epitaxial layer to SiO2/Si substrate, followed by epitaxial growth of InP to fabricate a buried-heterostructure (BH) on Si. The lateral p-i-n structure was formed by thermal diffusion of Zn and ion implantation of Si. For the purpose of evaluating laser parameters such as internal quantum efficiency and internal loss, we fabricated long-cavity lasers that have 200- to 600-µm-long active regions. The fabricated DBR lasers exhibit threshold currents of 1.7, 2.1, 2.8, and 3.7mA for active-region lengths of 200, 300, 400, and 600µm, respectively. The differential quantum efficiency also depends on active-region length. In addition, the laser characteristics depend on the distance between active region and p-doped region. We evaluated the internal loss to be 10.2cm-1 and internal quantum efficiency to be 32.4% with appropriate doping profile.