Novel Roll-to-Roll Deposition and Patterning of ITO on Ultra-Thin Glass for Flexible OLEDs

Tadahiro FURUKAWA  Mitsuhiro KODEN  

IEICE TRANSACTIONS on Electronics   Vol.E100-C   No.11   pp.949-954
Publication Date: 2017/11/01
Online ISSN: 1745-1353
DOI: 10.1587/transele.E100.C.949
Type of Manuscript: INVITED PAPER (Special Section on Electronic Displays)
roll-to-roll,  ITO,  ultra-thin glass,  OLED,  flexible,  photolithography-free,  

Full Text: FreePDF

Novel roll-to-roll (R2R) deposition and patterning of ITO on ultra-thin glass were developed with no photolithography and applied to flexible organic light emitting diodes (OLEDs). The developed deposition consists of low temperature sputtering and annealing. The developed patterning utilizes an etching paste printed by novel R2R screen printing.