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Novel Roll-to-Roll Deposition and Patterning of ITO on Ultra-Thin Glass for Flexible OLEDs
Tadahiro FURUKAWA Mitsuhiro KODEN
IEICE TRANSACTIONS on Electronics
Publication Date: 2017/11/01
Online ISSN: 1745-1353
Type of Manuscript: INVITED PAPER (Special Section on Electronic Displays)
roll-to-roll, ITO, ultra-thin glass, OLED, flexible, photolithography-free,
Full Text: FreePDF
Novel roll-to-roll (R2R) deposition and patterning of ITO on ultra-thin glass were developed with no photolithography and applied to flexible organic light emitting diodes (OLEDs). The developed deposition consists of low temperature sputtering and annealing. The developed patterning utilizes an etching paste printed by novel R2R screen printing.