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Analysis of Effective Material Properties of Metal Dummy Fills in a CMOS Chip
Takuichi HIRANO Ning LI Kenichi OKADA
Publication
IEICE TRANSACTIONS on Communications
Vol.E100-B
No.5
pp.793-798 Publication Date: 2017/05/01 Publicized: 2016/11/21 Online ISSN: 1745-1345
DOI: 10.1587/transcom.2016EBT0004 Type of Manuscript: PAPER Category: Antennas and Propagation Keyword: dummy metal fills, CMOS, effective material property, permittivity, permeability, millimeter-wave,
Full Text: PDF(2.2MB)>>
Summary:
The equivalent anisotropic material parameters of metal dummy fills in a CMOS chip were extracted through an eigenmode analysis of a unit-cell of a space filled with metal dummies. The validity of the parameters was confirmed by comparing the S-parameters of a parallel-plate waveguide with the metal dummy fills and their effective material properties. The validity of the effective material properties was also confirmed by using them in a simulation of an on-chip dipole antenna.
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