Analysis of Effective Material Properties of Metal Dummy Fills in a CMOS Chip

Takuichi HIRANO  Ning LI  Kenichi OKADA  

IEICE TRANSACTIONS on Communications   Vol.E100-B    No.5    pp.793-798
Publication Date: 2017/05/01
Publicized: 2016/11/21
Online ISSN: 1745-1345
DOI: 10.1587/transcom.2016EBT0004
Type of Manuscript: PAPER
Category: Antennas and Propagation
dummy metal fills,  CMOS,  effective material property,  permittivity,  permeability,  millimeter-wave,  

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The equivalent anisotropic material parameters of metal dummy fills in a CMOS chip were extracted through an eigenmode analysis of a unit-cell of a space filled with metal dummies. The validity of the parameters was confirmed by comparing the S-parameters of a parallel-plate waveguide with the metal dummy fills and their effective material properties. The validity of the effective material properties was also confirmed by using them in a simulation of an on-chip dipole antenna.