Keyword : zinc


Influences of Magnesium and Zinc Contaminations on Dielectric Breakdown Strength of MOS Capacitors
Makoto TAKIYAMA Susumu OHTSUKA Tadashi SAKON Masaharu TACHIMORI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/03/25
Vol. E77-C  No. 3 ; pp. 464-472
Type of Manuscript:  Special Section PAPER (Special Issue on Quarter Micron Si Device and Process Technologies)
Category: Process Technology
Keyword: 
silicon dioxidedielectric breakdownmetal contaminationmagnesiumzinc
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