Keyword : vertical comb


Tunable Vertical Comb for Driving Micromirror Realized by Bending Device Wafer
Minoru SASAKI Masahiro ISHIMORI JongHyeong SONG Kazuhiro HANE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2007/01/01
Vol. E90-C  No. 1 ; pp. 147-148
Type of Manuscript:  Special Section LETTER (Special Section on Microoptomechatronics)
Category: Micro/Nano Photonic Devices
Keyword: 
micromirrortuningvertical combwafer bending
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