Keyword : vertical comb drive

Electrostatically Actuated Two-Dimensional Optical Scanner Having a High Resonant Frequency Ratio of Fast/Slow Axes
Hiroshi NOGE Yosuke HAGIHARA Kiyohiko KAWANO Hideki UEDA Takaaki YOSHIHARA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2008/10/01
Vol. E91-C  No. 10 ; pp. 1611-1615
Type of Manuscript:  INVITED PAPER (Special Section on Electronic Displays)
MEMSvertical comb driveoptical scannermicro mirrorlaser display
 Summary | Full Text:PDF

Micromirror with Two Parallel Rotation Axes for External Cavity Diode Laser
Masahiro ISHIMORI Minoru SASAKI Kazuhiro HANE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2007/01/01
Vol. E90-C  No. 1 ; pp. 72-77
Type of Manuscript:  Special Section PAPER (Special Section on Microoptomechatronics)
Category: Micro/Nano Photonic Devices
micromirrortunable laser diodeLittman configurationvertical comb drivewafer bending
 Summary | Full Text:PDF