Publication: IEICE TRANSACTIONS on Electronics
Publication Date: 1997/03/25
Vol. E80-C
No. 3 ;
pp. 394-406
Type of Manuscript:
INVITED PAPER (Special Issue on SOI Devices and Their Process Technologies)
Category: Device and Process Technologies
Keyword:
SOI, SIMOX, MOSFET, down-scaling, ultra-thin, |
