Publication: IEICE TRANSACTIONS on Electronics
Publication Date: 2015/05/01
Vol. E98-C
No. 5 ;
pp. 382-389
Type of Manuscript:
Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
Category:
Keyword:
Gallium oxide, trimethylgallium, remote plasma, IR absorption spectroscopy, adsorption, oxidization, |