Publication: IEICE TRANSACTIONS on Electronics
Publication Date: 2008/10/01
Vol. E91-C
No. 10 ;
pp. 1653-1657
Type of Manuscript:
Special Section PAPER (Special Section on Functional Thin Films for Optical Applications)
Category:
Keyword:
tin-doped indium oxide, transparent thin film, ITO, sputtered film, gas flow sputtering, |