Keyword : titanium dioxide film


High-Rate Deposition of Titanium Dioxide Films with Photocatalytic Activities by Gas Flow Sputtering
Kiyoshi ISHII Kazunari KUROKAWA Sachio YOSHIHARA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2004/02/01
Vol. E87-C  No. 2 ; pp. 232-237
Type of Manuscript:  Special Section PAPER (Special Section on Recent Progress in Oxide Thin Films by Sputtering)
Category: 
Keyword: 
titanium dioxide filmphotocatalytic activitysputtered filmgas flow sputtering
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