Keyword : thin-film capacitor

Formation of Reliable Pb(Ti, Zr)O3 Thin-Film Capacitors for Read/Write Endurance of Ferroelectric Non-volatile Memories
Katsuhiro AOKI Yukio FUKUDA Ken NUMATA Akitoshi NISHIMURA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1998/04/25
Vol. E81-C  No. 4 ; pp. 537-544
Type of Manuscript:  Special Section PAPER (Special Issue on Advanced Memory Devices Using High-Dielectric-Constant and Ferroelectric Thin Films)
PZTfatigueferroelectricthin-film capacitoriridiumsol-gel
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