Keyword : thin film deposition


Study on Analysis and Fabrication Conditions of Horizontal SiO2 Slot Waveguides Using Nb2O5
Yoshiki HAYAMA Katsumi NAKATSUHARA Shinta UCHIBORI Takeshi NISHIZAWA 
Publication:   
Publication Date: 2020/11/01
Vol. E103-C  No. 11 ; pp. 669-678
Type of Manuscript:  Special Section PAPER (Special Section on Opto-electronics and Communications for Future Optical Network)
Category: 
Keyword: 
horizontal slot waveguideniobium oxidethin film depositionfinite-element-method
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