Keyword : tantalum oxide


Observation of Blue-Light Emission from Tantalum Oxide Films Deposited by Radio-Frequency Magnetron Sputtering
Kenta MIURA Hiroki MIYAZAKI Osamu HANAIZUMI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2008/10/01
Vol. E91-C  No. 10 ; pp. 1669-1672
Type of Manuscript:  Special Section PAPER (Special Section on Functional Thin Films for Optical Applications)
Category: 
Keyword: 
tantalum oxidesputteringannealingblue-light emission
 Summary | Full Text:PDF(362.4KB)

Highly Reliable Ultra-Thin Tantalum Oxide Capacitors for ULSI DRAMs
Satoshi KAMIYAMA Hiroshi SUZUKI Pierre-Yves LESAICHERRE Akihiko ISHITANI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/03/25
Vol. E77-C  No. 3 ; pp. 379-384
Type of Manuscript:  Special Section PAPER (Special Issue on Quarter Micron Si Device and Process Technologies)
Category: Device Technology
Keyword: 
tantalum oxiderapid thermal nitridation (RTN)SiO2 equivalent thicknessleakage currenttime dependent dielectric breakdown (TDDB)
 Summary | Full Text:PDF(583.2KB)