Keyword : strained silicon


Compact Analytical Threshold Voltage Model of Strained Gate-All-Around MOSFET Fabricated on Si1-xGex Virtual Substrate
Yefei ZHANG Zunchao LI Chuang WANG Feng LIANG 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2016/02/01
Vol. E99-C  No. 2 ; pp. 302-307
Type of Manuscript:  PAPER
Category: Semiconductor Materials and Devices
Keyword: 
compact modelingthreshold voltagestrained silicongate-all-around MOSFETSi1-xGex virtual substrate
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Novel High-Throughput Plasma Enhanced Growth of SiGe in a 200 mm/300 mm Single Wafer Cluster Tool
Juergen RAMM Hans von KANEL 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2003/10/01
Vol. E86-C  No. 10 ; pp. 1935-1942
Type of Manuscript:  INVITED PAPER (Special Issue on Heterostructure Microelectronics with TWHM2003)
Category: 
Keyword: 
epitaxyvirtual substratestrained siliconlow temperaturepre-epi cleanplasma
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