Keyword : stepper


Phase-Shifting Technology for ULSI Patterning
Tsuneo TERASAWA Shinji OKAZAKI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1993/01/25
Vol. E76-C  No. 1 ; pp. 19-25
Type of Manuscript:  INVITED PAPER (Special Issue on Opto-Electronics and LSI)
Category: Opto-Electronics Technology for LSIs
Keyword: 
optical lithographyultralarge scale integration devicesphase shift maskresolutiondepth of focusstepper
 Summary | Full Text:PDF

Recent Progress in KrF Excimer Laser Lithography
Makoto NAKASE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1993/01/25
Vol. E76-C  No. 1 ; pp. 26-31
Type of Manuscript:  INVITED PAPER (Special Issue on Opto-Electronics and LSI)
Category: Opto-Electronics Technology for LSIs
Keyword: 
lithographystepperexcimer laserresistsemiconductor device
 Summary | Full Text:PDF