Keyword : sputtering


Design and Fabrication of PTFE-Filled Waveguide Components by SR Direct Etching
Mitsuyoshi KISHIHARA Hiroaki IKEUCHI Yuichi UTSUMI Tadashi KAWAI Isao OHTA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2012/01/01
Vol. E95-C  No. 1 ; pp. 122-129
Type of Manuscript:  PAPER
Category: Microwaves, Millimeter-Waves
Keyword: 
X-ray lithographybandpass filtersdirectional couplerssputteringdielectric materials
 Summary | Full Text:PDF(2.3MB)

Dispersion of Nanoparticles in Liquid Crystals by Sputtering and Its Effect on the Electrooptic Properties
Hiroyuki YOSHIDA Kosuke KAWAMOTO Yuma TANAKA Hitoshi KUBO Akihiko FUJII Masanori OZAKI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2010/11/01
Vol. E93-C  No. 11 ; pp. 1595-1601
Type of Manuscript:  INVITED PAPER (Special Section on Electronic Displays)
Category: 
Keyword: 
liquid crystalsnanoparticlessputtering
 Summary | Full Text:PDF(1.7MB)

Hydrogen Plasma Annealing of ZnO Films Deposited by Magnetron Sputtering with Third Electrode
Kanji YASUI Yutaka OOSHIMA Yuichiro KUROKI Hiroshi NISHIYAMA Masasuke TAKATA Tadashi AKAHANE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2009/12/01
Vol. E92-C  No. 12 ; pp. 1438-1442
Type of Manuscript:  Special Section PAPER (Special Section on Nanomaterials and Nanodevices for Nanoscience and Nanotechnology)
Category: Nanomaterials and Nanostructures
Keyword: 
sputteringmesh electrodezinc oxideplasma annealing
 Summary | Full Text:PDF(702.1KB)

Observation of Blue-Light Emission from Tantalum Oxide Films Deposited by Radio-Frequency Magnetron Sputtering
Kenta MIURA Hiroki MIYAZAKI Osamu HANAIZUMI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2008/10/01
Vol. E91-C  No. 10 ; pp. 1669-1672
Type of Manuscript:  Special Section PAPER (Special Section on Functional Thin Films for Optical Applications)
Category: 
Keyword: 
tantalum oxidesputteringannealingblue-light emission
 Summary | Full Text:PDF(362.4KB)

Ultrathin HfOxNy Gate Insulator Formation by Electron Cyclotron Resonance Ar/N2 Plasma Nitridation of HfO2 Thin Films
Shun-ichiro OHMI Tomoki KUROSE Masaki SATOH 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2006/05/01
Vol. E89-C  No. 5 ; pp. 596-601
Type of Manuscript:  Special Section PAPER (Special Section on Fundamental and Application of Advanced Semiconductor Devices)
Category: Si Devices and Processes
Keyword: 
electron cyclotron resonancesputteringplasma nitridationpostdeposition annealinghigh-kHfOxNy
 Summary | Full Text:PDF(844.3KB)

AFM/STM Observation of C-Au-S Conductive Granular Molecule by Co-operation Process of Plasma CVD and Sputtering
Mikinori SUZUKI Md. Abul KASHEM Shinzo MORITA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2004/02/01
Vol. E87-C  No. 2 ; pp. 179-182
Type of Manuscript:  Special Section PAPER (Special Section on Recent Progress of Organic Molecular Electronics)
Category: Organic-neuro Systems
Keyword: 
AFM/STM observationC-Au-S conductive granular moleculeplasma CVDsputtering
 Summary | Full Text:PDF(356.6KB)

Fabrication of La-Doped YBCO and SrTiO3-Buffered LSAT Thin Films for Ramp-Edge Josephson Junctions on Superconducting Ground Plane
Seiji ADACHI Hironori WAKANA Yoshihiro ISHIMARU Masahiro HORIBE Yoshinobu TARUTANI Keiichi TANABE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2004/02/01
Vol. E87-C  No. 2 ; pp. 206-211
Type of Manuscript:  Special Section PAPER (Special Section on Recent Progress in Oxide Thin Films by Sputtering)
Category: 
Keyword: 
sputteringhigh-Tc superconductorsurface morphologyJosephson junction
 Summary | Full Text:PDF(1.1MB)

Characterization of AlON Thin Films Formed by ECR Plasma Oxidation of AlN/Si(100)
Shun-ichiro OHMI Go YAMANAKA Tetsushi SAKAI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2004/01/01
Vol. E87-C  No. 1 ; pp. 24-29
Type of Manuscript:  Special Section PAPER (Special Section on High-κ Gate Dielectrics)
Category: 
Keyword: 
high-κAlONECRsputteringoxidation
 Summary | Full Text:PDF(1.3MB)

C-Au Film Formed by Co-operation Process of Methane Plasma CVD and Sputtering of Gold
Md. Abul KASHEM Masaki MATUSHITA Shinzo MORITA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2002/06/01
Vol. E85-C  No. 6 ; pp. 1332-1333
Type of Manuscript:  Special Section LETTER (Special Issue on Recent Progress in Organic Molecular Electronics)
Category: Fabrication and Characterization of Thin Films
Keyword: 
RF plasma CVDsputteringC-Au filmrefractive indexoptical transmittance
 Summary | Full Text:PDF(162.9KB)

Improvement of Ferroelectric Hysteresis Curves in Epitaxial BaTiO3 Film Capacitors by 2-Step Deposition
Naoko YANASE Kazuhide ABE Noburu FUKUSHIMA Takashi KAWAKUBO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2001/06/01
Vol. E84-C  No. 6 ; pp. 796-801
Type of Manuscript:  Special Section PAPER (Special Issue on Nonvolatile Memories)
Category: FeRAMs
Keyword: 
barium titanateheteroepitaxial growthsputteringferroelectric hysteresis
 Summary | Full Text:PDF(1MB)

Influence of Film Characteristics on the Sputtering Rate of MgO
Souichirou HIDAKA Manabu ISHIMOTO Nobuhiro IWASE Keiichi BETSUI Hiroshi INOUE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1999/10/25
Vol. E82-C  No. 10 ; pp. 1804-1807
Type of Manuscript:  Special Section PAPER (Special Issue on Electronic Displays)
Category: 
Keyword: 
MgOPDPsputteringdensity
 Summary | Full Text:PDF(1.2MB)

A Surface Reinforced Glass Ferrule for Fiber Optic Connector
Shuichi YUNOKI Toshinori YOSHINO Takashi TANABE Tetsuji UEDA Takeshi OKI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1998/03/25
Vol. E81-C  No. 3 ; pp. 416-420
Type of Manuscript:  Special Section PAPER (Special Issue on Electromechanical Devices and their Surface Science)
Category: 
Keyword: 
glass ferrulewear-resistantcoatingsputteringalumina
 Summary | Full Text:PDF(666.1KB)

Control of Soft Magnetism of Co-Zr and Co-Zr-Ta Films for Backlayers in Perpendicular Magnetic Recording Media
Shigeki NAKAGAWA Masahiko NAOE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1995/11/25
Vol. E78-C  No. 11 ; pp. 1557-1561
Type of Manuscript:  Special Section PAPER (Special Issue on Ultra High Density Information Storage Technologies)
Category: 
Keyword: 
Co-ZrCo-Zr-Tasoft magnetismthin filmssputteringbacklayersperpendicular magnetic recording
 Summary | Full Text:PDF(418KB)

(Ba0.75Sr0.25)TiO3 Films for 256 Mbit DRAM
Tsuyoshi HORIKAWA Noboru MIKAMI Hiromi ITO Yoshikazu OHNO Tetsuro MAKITA Kazunao SATO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/03/25
Vol. E77-C  No. 3 ; pp. 385-391
Type of Manuscript:  Special Section PAPER (Special Issue on Quarter Micron Si Device and Process Technologies)
Category: Device Technology
Keyword: 
(Ba,Sr)TiO3ferroelectricDRAMsputteringgrain size effect
 Summary | Full Text:PDF(701KB)

Fabrication of Bi-Sr-Ca-Cu-O/Barrier/Bi-Sr-Ca-Cu-O Junction by Treatment with Carbonated Water
Shinichiro KOBA Moriaki UCHIYA Akio NAKAO Satoru HIGO Iwazo KAWANO Tetsuya OGUSHI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1993/08/25
Vol. E76-C  No. 8 ; pp. 1231-1235
Type of Manuscript:  Special Section PAPER (Special Issue on High-Temperature Superconducting Electronics)
Category: 
Keyword: 
high Tc superconductorBi-Sr-Ca-Cu-O systemthin filmssputteringthree layered Bi-Sr-Ca-Cu-O junctionI-V characteristics
 Summary | Full Text:PDF(468.1KB)