IEICE Trans

Keyword : sputtering

Design and Fabrication of PTFE-Filled Waveguide Components by SR Direct Etching Mitsuyoshi KISHIHARA Hiroaki IKEUCHI Yuichi UTSUMI Tadashi KAWAI Isao OHTA
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2012/01/01 Vol. E95-C No. 1 ; pp. 122-129 Type of Manuscript: PAPER Category: Microwaves, Millimeter-Waves Keyword: X-ray lithography, bandpass filters, directional couplers, sputtering, dielectric materials,
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Dispersion of Nanoparticles in Liquid Crystals by Sputtering and Its Effect on the Electrooptic Properties Hiroyuki YOSHIDA Kosuke KAWAMOTO Yuma TANAKA Hitoshi KUBO Akihiko FUJII Masanori OZAKI
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2010/11/01 Vol. E93-C No. 11 ; pp. 1595-1601 Type of Manuscript: INVITED PAPER (Special Section on Electronic Displays) Category: Keyword: liquid crystals, nanoparticles, sputtering,
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Hydrogen Plasma Annealing of ZnO Films Deposited by Magnetron Sputtering with Third Electrode Kanji YASUI Yutaka OOSHIMA Yuichiro KUROKI Hiroshi NISHIYAMA Masasuke TAKATA Tadashi AKAHANE
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2009/12/01 Vol. E92-C No. 12 ; pp. 1438-1442 Type of Manuscript: Special Section PAPER (Special Section on Nanomaterials and Nanodevices for Nanoscience and Nanotechnology) Category: Nanomaterials and Nanostructures Keyword: sputtering, mesh electrode, zinc oxide, plasma annealing,
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Observation of Blue-Light Emission from Tantalum Oxide Films Deposited by Radio-Frequency Magnetron Sputtering Kenta MIURA Hiroki MIYAZAKI Osamu HANAIZUMI
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2008/10/01 Vol. E91-C No. 10 ; pp. 1669-1672 Type of Manuscript: Special Section PAPER (Special Section on Functional Thin Films for Optical Applications) Category: Keyword: tantalum oxide, sputtering, annealing, blue-light emission,
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Ultrathin HfO_xN_y Gate Insulator Formation by Electron Cyclotron Resonance Ar/N₂ Plasma Nitridation of HfO₂ Thin Films Shun-ichiro OHMI Tomoki KUROSE Masaki SATOH
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2006/05/01 Vol. E89-C No. 5 ; pp. 596-601 Type of Manuscript: Special Section PAPER (Special Section on Fundamental and Application of Advanced Semiconductor Devices) Category: Si Devices and Processes Keyword: electron cyclotron resonance, sputtering, plasma nitridation, postdeposition annealing, high-k, HfO_xN_y,
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AFM/STM Observation of C-Au-S Conductive Granular Molecule by Co-operation Process of Plasma CVD and Sputtering Mikinori SUZUKI Md. Abul KASHEM Shinzo MORITA
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2004/02/01 Vol. E87-C No. 2 ; pp. 179-182 Type of Manuscript: Special Section PAPER (Special Section on Recent Progress of Organic Molecular Electronics) Category: Organic-neuro Systems Keyword: AFM/STM observation, C-Au-S conductive granular molecule, plasma CVD, sputtering,
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Fabrication of La-Doped YBCO and SrTiO₃-Buffered LSAT Thin Films for Ramp-Edge Josephson Junctions on Superconducting Ground Plane Seiji ADACHI Hironori WAKANA Yoshihiro ISHIMARU Masahiro HORIBE Yoshinobu TARUTANI Keiichi TANABE
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2004/02/01 Vol. E87-C No. 2 ; pp. 206-211 Type of Manuscript: Special Section PAPER (Special Section on Recent Progress in Oxide Thin Films by Sputtering) Category: Keyword: sputtering, high-T_c superconductor, surface morphology, Josephson junction,
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Characterization of AlON Thin Films Formed by ECR Plasma Oxidation of AlN/Si(100) Shun-ichiro OHMI Go YAMANAKA Tetsushi SAKAI
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2004/01/01 Vol. E87-C No. 1 ; pp. 24-29 Type of Manuscript: Special Section PAPER (Special Section on High-κ Gate Dielectrics) Category: Keyword: high-κ, AlON, ECR, sputtering, oxidation,
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C-Au Film Formed by Co-operation Process of Methane Plasma CVD and Sputtering of Gold Md. Abul KASHEM Masaki MATUSHITA Shinzo MORITA
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2002/06/01 Vol. E85-C No. 6 ; pp. 1332-1333 Type of Manuscript: Special Section LETTER (Special Issue on Recent Progress in Organic Molecular Electronics) Category: Fabrication and Characterization of Thin Films Keyword: RF plasma CVD, sputtering, C-Au film, refractive index, optical transmittance,
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Improvement of Ferroelectric Hysteresis Curves in Epitaxial BaTiO₃ Film Capacitors by 2-Step Deposition Naoko YANASE Kazuhide ABE Noburu FUKUSHIMA Takashi KAWAKUBO
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2001/06/01 Vol. E84-C No. 6 ; pp. 796-801 Type of Manuscript: Special Section PAPER (Special Issue on Nonvolatile Memories) Category: FeRAMs Keyword: barium titanate, heteroepitaxial growth, sputtering, ferroelectric hysteresis,
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Influence of Film Characteristics on the Sputtering Rate of MgO Souichirou HIDAKA Manabu ISHIMOTO Nobuhiro IWASE Keiichi BETSUI Hiroshi INOUE
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 1999/10/25 Vol. E82-C No. 10 ; pp. 1804-1807 Type of Manuscript: Special Section PAPER (Special Issue on Electronic Displays) Category: Keyword: MgO, PDP, sputtering, density,
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A Surface Reinforced Glass Ferrule for Fiber Optic Connector Shuichi YUNOKI Toshinori YOSHINO Takashi TANABE Tetsuji UEDA Takeshi OKI
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 1998/03/25 Vol. E81-C No. 3 ; pp. 416-420 Type of Manuscript: Special Section PAPER (Special Issue on Electromechanical Devices and their Surface Science) Category: Keyword: glass ferrule, wear-resistant, coating, sputtering, alumina,
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Control of Soft Magnetism of Co-Zr and Co-Zr-Ta Films for Backlayers in Perpendicular Magnetic Recording Media Shigeki NAKAGAWA Masahiko NAOE
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 1995/11/25 Vol. E78-C No. 11 ; pp. 1557-1561 Type of Manuscript: Special Section PAPER (Special Issue on Ultra High Density Information Storage Technologies) Category: Keyword: Co-Zr, Co-Zr-Ta, soft magnetism, thin films, sputtering, backlayers, perpendicular magnetic recording,
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(Ba_0.75Sr_0.25)TiO₃ Films for 256 Mbit DRAM Tsuyoshi HORIKAWA Noboru MIKAMI Hiromi ITO Yoshikazu OHNO Tetsuro MAKITA Kazunao SATO
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 1994/03/25 Vol. E77-C No. 3 ; pp. 385-391 Type of Manuscript: Special Section PAPER (Special Issue on Quarter Micron Si Device and Process Technologies) Category: Device Technology Keyword: (Ba,Sr)TiO₃, ferroelectric, DRAM, sputtering, grain size effect,
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Fabrication of Bi-Sr-Ca-Cu-O/Barrier/Bi-Sr-Ca-Cu-O Junction by Treatment with Carbonated Water Shinichiro KOBA Moriaki UCHIYA Akio NAKAO Satoru HIGO Iwazo KAWANO Tetsuya OGUSHI
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 1993/08/25 Vol. E76-C No. 8 ; pp. 1231-1235 Type of Manuscript: Special Section PAPER (Special Issue on High-Temperature Superconducting Electronics) Category: Keyword: high T_c superconductor, Bi-Sr-Ca-Cu-O system, thin films, sputtering, three layered Bi-Sr-Ca-Cu-O junction, I-V characteristics,
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