Keyword : sputtered film


Estimation of Optimum Ion Energy for the Reduction of Resistivity in Bias Sputtering of ITO Thin Films
Kiyoshi ISHII Yoshifumi SAITOU Kengo FURUTANI Hiroshi SAKUMA Yoshito IKEDA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2008/10/01
Vol. E91-C  No. 10 ; pp. 1653-1657
Type of Manuscript:  Special Section PAPER (Special Section on Functional Thin Films for Optical Applications)
Category: 
Keyword: 
tin-doped indium oxidetransparent thin filmITOsputtered filmgas flow sputtering
 Summary | Full Text:PDF

High-Rate Deposition of Titanium Dioxide Films with Photocatalytic Activities by Gas Flow Sputtering
Kiyoshi ISHII Kazunari KUROKAWA Sachio YOSHIHARA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2004/02/01
Vol. E87-C  No. 2 ; pp. 232-237
Type of Manuscript:  Special Section PAPER (Special Section on Recent Progress in Oxide Thin Films by Sputtering)
Category: 
Keyword: 
titanium dioxide filmphotocatalytic activitysputtered filmgas flow sputtering
 Summary | Full Text:PDF