Keyword : source/drain profile


Source/Drain Engineering for High Performance Vertical MOSFET
Takuya IMAMOTO Tetsuo ENDOH 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2012/05/01
Vol. E95-C  No. 5 ; pp. 807-813
Type of Manuscript:  Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
Category: 
Keyword: 
Vertical MOSFETvolume inversionbody channelgate-all-aroundsource/drain profilefloating body
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