Keyword : silicon-cantilever


Fatigue Characteristics of the Si Moveable Comb Inserted into MEMS Optical Devices
Takayuki SHIMAZU Makoto KATAYAMA Yoshitada ISONO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2005/05/01
Vol. E88-C  No. 5 ; pp. 1020-1024
Type of Manuscript:  Special Section PAPER (Joint Special Section on Recent Progress in Optoelectronics and Communications)
Category: Optical Passive Devices and Modules
Keyword: 
silicon-cantileverfatigueS-N curveWeibull distributionFIT number
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