Keyword : sidewall spacer gate


Design and Simulation of Asymmetric MOSFETs
Jong Pil KIM Woo Young CHOI Jae Young SONG Seongjae CHO Sang Wan KIM Jong Duk LEE Byung-Gook PARK 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2007/05/01
Vol. E90-C  No. 5 ; pp. 978-982
Type of Manuscript:  Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
Category: Junction Formation and TFT Reliability
Keyword: 
asymmetric MOSFETLDDmesa structuresidewall spacer gate
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