Keyword : shallow trench


Mechanical Stress Analysis of Trench Isolation Using a Two-Dimensional Simulation
Satoshi MATSUDA Nobuyuki ITOH Chihiro YOSHINO Yoshiroh TSUBOI Yasuhiro KATSUMATA Hiroshi IWAI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/02/25
Vol. E77-C  No. 2 ; pp. 124-128
Type of Manuscript:  Special Section PAPER (Special Issue on 1993 VLSI Process and Device Modeling Workshop (VPAD 93))
Category: Process Simulation
Keyword: 
trench isolationshallow trenchdeep trenchhigh-speed bipolar LSIsleakage currentmechanical stress
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