Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2016/05/01 Vol. E99-CNo. 5 ;
pp. 516-521 Type of Manuscript: Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices) Category: Keyword: power MOSFETs, laser annealing, shallow junction, electrical characteristics,
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 1994/02/25 Vol. E77-CNo. 2 ;
pp. 106-111 Type of Manuscript: Special Section PAPER (Special Issue on 1993 VLSI Process and Device Modeling Workshop (VPAD 93)) Category: Process Simulation Keyword: transient enhanced diffusion, two-dimension, phosphorus, silicon, shallow junction, furnace annealing,
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 1993/04/25 Vol. E76-CNo. 4 ;
pp. 532-540 Type of Manuscript: Special Section PAPER (Special Issue on Sub-Half Micron Si Device and Process Technologies) Category: Device Technology Keyword: MOS transistor, shallow junction, salicide, titanium,