Keyword : semiconductor technology

Control and Improvement of Surface Triangulation for Three-Dimensional Process Simulation
Eberhard BAR Jurgen LORENZ 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2000/08/25
Vol. E83-C  No. 8 ; pp. 1338-1342
Type of Manuscript:  Special Section PAPER (Special Issue on 1999 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD'99))
Category: Numerics
semiconductor technologyprocess simulationsurface triangulationgrid generation
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