Keyword : self alignment


A 40GHz fT SATURN Transistor Using 2-Step Epitaxial Base Technology
Hirokazu FUJIMAKI Koji YAMONO Kenichi SUZUKI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/04/25
Vol. E79-C  No. 4 ; pp. 549-553
Type of Manuscript:  Special Section PAPER (Special Issue on Ultra-High-Speed LSIs)
Category: 
Keyword: 
bipolar LSIepitaxyself alignmentcut-off frequencyoptical communication
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