Keyword : segregation


Grain Boundary Segregation of Non-magnetic Phases during Crystallization of Co-Based Glasses
Tae Young BYUN Yoong OH Chong Seung YOON Chang Kyung KIM 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2003/09/01
Vol. E86-C  No. 9 ; pp. 1830-1834
Type of Manuscript:  Special Section PAPER (Special Issue on Recent Progress of High-Density Disk Storage)
Category: 
Keyword: 
segregationnon-magnetic phasecrystallizationamorphous alloy
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Multiscale Simulation of Diffusion, Deactivation and Segregation of Boron in Silicon
Wolfgang WINDL 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2003/03/01
Vol. E86-C  No. 3 ; pp. 269-275
Type of Manuscript:  INVITED PAPER (Special Issue on the 2002 IEEE International Conference on Simulation of Semiconductor Processes and Devices (SISPAD'02))
Category: 
Keyword: 
ab-initioborondiffusiondeactivationsegregation
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3-D Topography and Impurity Integrated Process Simulator (3-D MIPS) and Its Applications
Masato FUJINAGO Tatsuya KUNIKIYO Tetsuya UCHIDA Eiji TSUKUDA Kenichiro SONODA Katsumi EIKYU Kiyoshi ISHIKAWA Tadashi NISHIMURA Satoru KAWAZU 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1999/06/25
Vol. E82-C  No. 6 ; pp. 848-861
Type of Manuscript:  Special Section PAPER (Special Issue on TCAD for Semiconductor Industries)
Category: 
Keyword: 
LSI fabricationprocess simulatortopographyimpurity diffusionsegregationcapacitance
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The Segregation and Removal of Metallic Impurities at the Interface of Silicon Wafer Surface and Liquid Chemicals
Takashi IMAOKA Takehiko KEZUKA Jun TAKANO Isamu SUGIYAMA Tadahiro OHMI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1992/07/25
Vol. E75-C  No. 7 ; pp. 816-828
Type of Manuscript:  Special Section PAPER (Special Issue on Ultra Clean Technology)
Category: 
Keyword: 
metallic impuritysegregationwafer cleaning
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