Keyword : scanning electron microscope


Transition Edge Sensor-Energy Dispersive Spectrometer (TES-EDS) and Its Applications
Keiichi TANAKA Akikazu ODAWARA Atsushi NAGATA Yukari BABA Satoshi NAKAYAMA Shigenori AIDA Toshimitsu MOROOKA Yoshikazu HOMMA Izumi NAKAI Kazuo CHINONE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2009/03/01
Vol. E92-C  No. 3 ; pp. 334-340
Type of Manuscript:  INVITED PAPER (Special Section on Recent Progress in Superconducting Analog Devices and Their Applications)
Category: 
Keyword: 
energy dispersive X-ray detectorscanning electron microscopesuperconducting transition temperaturedilution refrigeratorhigh energy resolution
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High-Resolution Wafer Inspection Using the "in-lens SEM"
Fumio MIZUNO Satoru YAMADA Tadashi OHTAKA Nobuo TSUMAKI Toshifumi KOIKE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/03/25
Vol. E79-C  No. 3 ; pp. 317-323
Type of Manuscript:  Special Section PAPER (Special Issue on Scientific ULSI Manufacturing Technology)
Category: Particle/Defect Control and Analysis
Keyword: 
semiconductor deviceswafer inspectionscanning electron microscopeobjective lenseucentric stageacoustic motorspatial resolutionline-width measurementBEASTLI
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Effects of 50 to 200-keV Electrons by BEASTLI Method on Semiconductor Devices
Fumio MIZUNO Satoru YAMADA Tsunao ONO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/03/25
Vol. E79-C  No. 3 ; pp. 392-397
Type of Manuscript:  Special Section PAPER (Special Issue on Scientific ULSI Manufacturing Technology)
Category: Device Issues
Keyword: 
semiconductor deviceswafer inspectionscanning electron microscopehigh-energy electron beamdevice damagesurface chargingBEASTLI
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