Keyword : scanning electron microscope (SEM)


Robust Surface Reconstruction in SEM Using Two BSE Detectors
Deshan CHEN Atsushi MIYAMOTO Shun'ichi KANEKO 
Publication:   IEICE TRANSACTIONS on Information and Systems
Publication Date: 2013/10/01
Vol. E96-D  No. 10 ; pp. 2224-2234
Type of Manuscript:  PAPER
Category: Image Recognition, Computer Vision
Keyword: 
scanning electron microscope (SEM)surface reconstructionshadowing compensationbackscattering electron
 Summary | Full Text:PDF(3.3MB)

Focused Ion Beam Applications to Failure Analysis of Si Device Chip
Kiyoshi NIKAWA 
Publication:   IEICE TRANSACTIONS on Fundamentals of Electronics, Communications and Computer Sciences
Publication Date: 1994/01/25
Vol. E77-A  No. 1 ; pp. 174-179
Type of Manuscript:  Special Section PAPER (Special Section on Reliability)
Category: Failure Physics and Failure Analysis
Keyword: 
focused ion beam (FIB)scanning ion microscope (SIM)scanning electron microscope (SEM)transmission electron microscope (TEM)electron beam probing (EBP)microscopic cross-sectioning and observationmicroscopic crosssectioning and elemental analysisaluminum film microstructure observation
 Summary | Full Text:PDF(710.4KB)