Keyword : reactive ion etching


Color Filter Based on Surface Plasmon Resonance Utilizing Sub-Micron Periodic Hole Array in Aluminum Thin Film
Naoki IKEDA Yoshimasa SUGIMOTO Masayuki OCHIAI Daijyu TSUYA Yasuo KOIDE Daisuke INOUE Atsushi MIURA Tsuyoshi NOMURA Hisayoshi FUJIKAWA Kazuo SATO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2012/02/01
Vol. E95-C  No. 2 ; pp. 251-254
Type of Manuscript:  BRIEF PAPER
Category: 
Keyword: 
surface plasmon resonancealuminumcolor filterelectron beam lithographyreactive ion etching
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High Resolution Long Array Thermal Ink Jet Printhead with On-Chip LSI Heater Plate and Micromachined Si Channel Plate
Michiaki MURATA Masaki KATAOKA Regan NAYVE Atsushi FUKUGAWA Yoshihisa UEDA Tohru MIHARA Masahiko FUJII Toshimichi IWAMORI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2001/12/01
Vol. E84-C  No. 12 ; pp. 1792-1800
Type of Manuscript:  Special Section PAPER (Special Issue on Integrated Systems with New Concepts)
Category: 
Keyword: 
thermal ink jetmicromachiningdrop ejectorreactive ion etchingelectrostatic bonding
 Summary | Full Text:PDF