Keyword : rapid thermal annealing (RTA)


Rapid-Thermal Annealing of Amorphous Silicon on Oxide Semiconductors
Saurabh SAXENA Jin JANG 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2010/10/01
Vol. E93-C  No. 10 ; pp. 1495-1498
Type of Manuscript:  Special Section PAPER (Special Section on Frontier of Thin-Film Transistor Technology)
Category: 
Keyword: 
rapid thermal annealing (RTA)ZnOZnO:Al (AZO)polycrystalline solar cell
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Effects of Rapid Thermal Annealing on Poly-Si TFT with Different Gate Oxide Thickness
Ching-Lin FAN Yi-Yan LIN Yan-Hang YANG Hung-Che CHEN 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2010/01/01
Vol. E93-C  No. 1 ; pp. 151-153
Type of Manuscript:  LETTER
Category: Electronic Displays
Keyword: 
polycrystalline silicon (poly-Si) thin film transistors (TFTs)rapid thermal annealing (RTA)gate oxide thickness
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