Keyword : pulse-field-assisted bonding


High-Temperature Operation of nMOSFET on Bonded SOI
Yoshihiro ARIMOTO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1992/12/25
Vol. E75-C  No. 12 ; pp. 1442-1446
Type of Manuscript:  Special Section PAPER (Special Issue on SOI (Si on Insulator) Devices)
Category: SOI Devices
Keyword: 
bonded SOISOI-MOSFETpulse-field-assisted bondingleakagehigh-temperature operation
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