Keyword : pre-injection


Current Progress in Epitaxial Layer Transfer (ELTRAN(R))
Kiyofumi SAKAGUCHI Nobuhiko SATO Kenji YAMAGATA Tadashi ATOJI Yasutomo FUJIYAMA Jun NAKAYAMA Takao YONEHARA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1997/03/25
Vol. E80-C  No. 3 ; pp. 378-387
Type of Manuscript:  INVITED PAPER (Special Issue on SOI Devices and Their Process Technologies)
Category: Wafer Technologies
Keyword: 
porousBESOIpre-injectionstructure-sensitive etchinghydrogen annealingedge exclusionbatch process
 Summary | Full Text:PDF