Keyword : power MOSFETs


An Application of Laser Annealing Process in Low-Voltage Power MOSFETs
Yi CHEN Tatsuya OKADA Takashi NOGUCHI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2016/05/01
Vol. E99-C  No. 5 ; pp. 516-521
Type of Manuscript:  Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
Category: 
Keyword: 
power MOSFETslaser annealingshallow junctionelectrical characteristics
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