Keyword : plasma chemical vapor deposition


The Long-Term Charge Storage Mechanism of Silicon Dioxide Electrets for Microsystems
Mitsuo ICHIYA Takuro NAKAMURA Shuji NAKATA Jacques LEWINER 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/10/25
Vol. E79-C  No. 10 ; pp. 1462-1466
Type of Manuscript:  PAPER
Category: Materials
Keyword: 
electretsilicon dioxideplasma chemical vapor depositioncharge stabilitythermally stimulated currentelectron spin resonance
 Summary | Full Text:PDF