Keyword : planarization


Nb 9-Layer Fabrication Process for Superconducting Large-Scale SFQ Circuits and Its Process Evaluation
Shuichi NAGASAWA Kenji HINODE Tetsuro SATOH Mutsuo HIDAKA Hiroyuki AKAIKE Akira FUJIMAKI Nobuyuki YOSHIKAWA Kazuyoshi TAKAGI Naofumi TAKAGI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2014/03/01
Vol. E97-C  No. 3 ; pp. 132-140
Type of Manuscript:  INVITED PAPER (Special Section on Leading-Edge Technology of Superconductor Large-Scale Integrated Circuits)
Category: 
Keyword: 
superconducting fabrication technologyNb/AlOx/Nb Josephson junctionsingle flux quantumplanarizationshift register
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Pattern-Size-Free Planarization for Multilayered Large-Scale SFQ Circuits
Kenji HINODE Shuichi NAGASAWA Masao SUGITA Tetsuro SATOH Hiroyuki AKAIKE Yoshihiro KITAGAWA Mutsuo HIDAKA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2003/12/01
Vol. E86-C  No. 12 ; pp. 2511-2513
Type of Manuscript:  LETTER
Category: Superconductive Electronics
Keyword: 
planarizationreversal maskNb SFQmultilevel wiring
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Fabrication Technology for Nb Integrated Circuits
Hideaki NUMATA Shuichi TAHARA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2001/01/01
Vol. E84-C  No. 1 ; pp. 2-8
Type of Manuscript:  INVITED PAPER (Special Issue on Superconductive Electronics)
Category: Digital Applications
Keyword: 
NbJosephson junctionetchingplanarizationintegration
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Superconducting Technology for Digital Applications Using Niobium Josephson Junctions
Shuichi TAHARA Hideaki NUMATA Shinichi YOROZU Yoshihito HASHIMOTO Shuichi NAGASAWA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2000/01/25
Vol. E83-C  No. 1 ; pp. 60-68
Type of Manuscript:  INVITED PAPER (Special Issue on Superconductive Devices and Systems)
Category: Digital Applications
Keyword: 
Josephson junctionsplanarizationmoat structurememorynetwork
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