Publication: IEICE TRANSACTIONS on Electronics
Publication Date: 1995/02/25
Vol. E78-C
No. 2 ;
pp. 146-151
Type of Manuscript:
Special Section PAPER (Special Issue on Micromachines and Micro Electro Mechanical Systems)
Category:
Keyword:
SFM, piezoelectric microcantilever, ZnO, piezoelectric excitation, deflection detection, |
