Keyword : photon emission


Degradation Mechanisms of Thin Film SIMOX SOI-MOSFET Characteristics--Optical and Electrical Evaluation--
Mitsuru YAMAJI Kenji TANIGUSHI Chihiro HAMAGUCHI Kazuo SUKEGAWA Seiichiro KAWAMURA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/03/25
Vol. E77-C  No. 3 ; pp. 373-378
Type of Manuscript:  Special Section PAPER (Special Issue on Quarter Micron Si Device and Process Technologies)
Category: Device Technology
Keyword: 
SOI-MOSFEThot carrierphoton emissionhole trapimpact-ionizationelectron-hole recombination
 Summary | Full Text:PDF

Evaluation of Plasma Damage to Gate Oxide
Yukiharu URAOKA Koji ERIGUCHI Tokuhiko TAMAKI Kazuhiko TSUJI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/03/25
Vol. E77-C  No. 3 ; pp. 453-458
Type of Manuscript:  Special Section PAPER (Special Issue on Quarter Micron Si Device and Process Technologies)
Category: Process Technology
Keyword: 
QBDgate oxideplasmareliabilitydamagephoton emissionLOCOSthinning
 Summary | Full Text:PDF

A New Technique for Evaluating Gate Oxide Reliability Using a Photon Emission Method
Yukiharu URAOKA Kazuhiko TSUJI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1993/04/25
Vol. E76-C  No. 4 ; pp. 519-524
Type of Manuscript:  Special Section PAPER (Special Issue on Sub-Half Micron Si Device and Process Technologies)
Category: Device Technology
Keyword: 
reliabilityphoton emissionTDDBgate oxideLOCOS
 Summary | Full Text:PDF

Hot-Carrier-Induced Photon Emission in Thin SOI/MOSFETs
Seiichiro KAWAMURA Takami MAKINO Kazuo SUKEGAWA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1992/12/25
Vol. E75-C  No. 12 ; pp. 1471-1476
Type of Manuscript:  Special Section PAPER (Special Issue on SOI (Si on Insulator) Devices)
Category: Hot Carrier
Keyword: 
hot-carrierphoton emissionthin SOIcarrier temperature
 Summary | Full Text:PDF