Keyword : photolithography


Fabrication of Coplanar Microstructures Composed of Multiple Organosilane Self-Assembled Monolayers
Hiroyuki SUGIMURA Atsushi HOZUMI Osamu TAKAI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2000/07/25
Vol. E83-C  No. 7 ; pp. 1099-1103
Type of Manuscript:  Special Section PAPER (Special Issue on Organic Molecular Electronics for the 21st Century)
Category: Ultra Thin Film
Keyword: 
photolithographyorganosilane self-assembled monolayerchemical vapor depositionscanning probe microscopeexcimer lamp
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Yield Prediction Method Considering the Effect of Particles on Sub-Micron Patterning
Nobuyoshi HATTORI Masahiko IKENO Hitoshi NAGATA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/03/25
Vol. E79-C  No. 3 ; pp. 277-281
Type of Manuscript:  Special Section PAPER (Special Issue on Scientific ULSI Manufacturing Technology)
Category: CIM/CAM
Keyword: 
yield predictionpattern defectphotolithographysemiconducter manufacturing
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High Performance Lithography with Advanced Modified Illumination
Ho-Young KANG Cheol-Hong KIM Joong-Hyun LEE Woo-Sung HAN Young-Bum KOH 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/03/25
Vol. E77-C  No. 3 ; pp. 432-437
Type of Manuscript:  Special Section PAPER (Special Issue on Quarter Micron Si Device and Process Technologies)
Category: Process Technology
Keyword: 
memory technologiesphotolithographyopticsilluminationresolution
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Sub-Half Micron Exposure System with Optimized Illumination
Akiyoshi SUZUKI Miyoko NOGUCHI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1993/01/25
Vol. E76-C  No. 1 ; pp. 13-18
Type of Manuscript:  INVITED PAPER (Special Issue on Opto-Electronics and LSI)
Category: Opto-Electronics Technology for LSIs
Keyword: 
photolithographyresolutiondepth of focusilluminationquadrupole illumination
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