Keyword : particle


Formation of Soluble Ink Using Nanoparticles of Low Molecular EL Materials
Naoaki SAKURAI Hiroyasu KONDO Shuzi HAYASE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2014/01/01
Vol. E97-C  No. 1 ; pp. 85-90
Type of Manuscript:  PAPER
Category: Electronic Displays
Keyword: 
electroluminescenceink-jetirradiationparticle
 Summary | Full Text:PDF

Using Langevin-Type Stochastic-Dynamical Particles for Sampling and Rendering Implicit Surfaces
Satoshi TANAKA Yasushi FUKUDA Akio MORISAKI Satoru NAKATA 
Publication:   IEICE TRANSACTIONS on Information and Systems
Publication Date: 2000/02/25
Vol. E83-D  No. 2 ; pp. 265-274
Type of Manuscript:  PAPER
Category: Computer Graphics
Keyword: 
implicit surfacesamplingstochastic process, Langevin equationparticle
 Summary | Full Text:PDF

Issues of Wet Cleaning in ULSI Process
Tsuneo AJIOKA Mayumi SHIBATA Yasuo MIZOKAMI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/03/25
Vol. E79-C  No. 3 ; pp. 337-342
Type of Manuscript:  Special Section PAPER (Special Issue on Scientific ULSI Manufacturing Technology)
Category: High-Performance Processing
Keyword: 
wet cleaningmetallic contaminationparticlelifetime
 Summary | Full Text:PDF

Particle Growth Caused by Film Deposition in VLSI Manufacturing Process
Yoshimasa TAKII Yuichi MIYOSHI Yuichi HIROFUJI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/03/25
Vol. E79-C  No. 3 ; pp. 312-316
Type of Manuscript:  Special Section PAPER (Special Issue on Scientific ULSI Manufacturing Technology)
Category: Particle/Defect Control and Analysis
Keyword: 
particle growthparticledefectclean technologyfilm deposition
 Summary | Full Text:PDF

Sizes and Numbers of Particles Being Capable of Causing Pattern Defects in Semiconductor Device Manufacturing
Mototaka KAMOSHIDA Hirotomo INUI Toshiyuki OHTA Kunihiko KASAMA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/03/25
Vol. E79-C  No. 3 ; pp. 264-271
Type of Manuscript:  INVITED PAPER (Special Issue on Scientific ULSI Manufacturing Technology)
Category: 
Keyword: 
semiconductor device manufacturingparticlesizenumberpattern defect
 Summary | Full Text:PDF

Identification of the Particle Source in LSI Manufacturing Process Equipment
Yoshimasa TAKII Nobuo AOI Yuichi HIROFUJI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/03/25
Vol. E77-C  No. 3 ; pp. 486-491
Type of Manuscript:  Special Section PAPER (Special Issue on Quarter Micron Si Device and Process Technologies)
Category: Process Technology
Keyword: 
clean technologyparticledefectequipmentparticle source
 Summary | Full Text:PDF

Removal of Particles on Si Wafers in SC-1 Solution
Hiroyuki KAWAHARA Kenji YONEDA Izumi MUROZONO Yoshihiro TODOKORO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/03/25
Vol. E77-C  No. 3 ; pp. 492-497
Type of Manuscript:  Special Section PAPER (Special Issue on Quarter Micron Si Device and Process Technologies)
Category: Process Technology
Keyword: 
particleSC-1 solutionetchingVan der Waals forcecleaning
 Summary | Full Text:PDF