Keyword : partially depleted


Partially Depleted SOI Technology with Body-Tied Hybrid Trench Isolation for High-Speed System-On-a-Chip Application
Yasuo YAMAGUCHI Takashi IPPOSHI Kimio UEDA Koichiro MASHIKO Shigeto MAEGAWA Masahide INUISHI Tadashi NISHIMURA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2001/12/01
Vol. E84-C  No. 12 ; pp. 1735-1745
Type of Manuscript:  Special Section PAPER (Special Issue on Integrated Systems with New Concepts)
Category: 
Keyword: 
SOISOCpartially depletedisolation
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