Keyword : parasitic field transistor


Deep Submicron Field Isolation with Buried Insulator between Polysilicon Electrodes (BIPS)
Masahiro SHIMIZU Masahide INUISHI Katsuhiro TSUKAMOTO Hideaki ARIMA Hirokazu MIYOSHI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/08/25
Vol. E77-C  No. 8 ; pp. 1369-1376
Type of Manuscript:  Special Section PAPER (Special Section on High Speed and High Density Multi Functional LSI Memories)
Category: General Technology
Keyword: 
isolationparasitic field transistorMOSFET
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