Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2010/08/01 Vol. E93-CNo. 8 ;
pp. 1234-1237 Type of Manuscript: Special Section PAPER (Special Section on Heterostructure Microelectronics with TWHM 2009) Category: GaN-based Devices Keyword: AlGaN/GaN HFET, VT-VSUB, substrate bias, p-GaN, SIMS,
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2008/07/01 Vol. E91-CNo. 7 ;
pp. 1020-1024 Type of Manuscript: Special Section PAPER (Special Section on Heterostructure Microelectronics with TWHM 2007) Category: GaN Process Technology Keyword: Ohmic contact, p-GaN, dry-etching, etching damage, SiCl4,
