Keyword : ozone


Epitaxial Growth of Bi (2201) Phase in Atomic Layer-by-Layer Deposition by Ion Beam Sputtering Method
Kazuo SAKAI Shinji MIGITA Hiroyuki OTA Hiroshi OTERA Ryozo AOKI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1993/08/25
Vol. E76-C  No. 8 ; pp. 1246-1250
Type of Manuscript:  Special Section PAPER (Special Issue on High-Temperature Superconducting Electronics)
Category: 
Keyword: 
ion beam sputteringBSCCO(2201)ozoneultraviolet lightsuperconductorbuffer layer
 Summary | Full Text:PDF(768.3KB)

Optimization of Photolithography Developing Process without Residual Surfactant on Surfaces
Hisayuki SHIMADA Shigeki SHIMOMURA Kouichi HIROSE Masanobu ONODERA Tadahiro OHMI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1992/07/25
Vol. E75-C  No. 7 ; pp. 844-851
Type of Manuscript:  Special Section PAPER (Special Issue on Ultra Clean Technology)
Category: 
Keyword: 
developersurfactantcarbonhydrogen peroxideozone
 Summary | Full Text:PDF(864.8KB)