Keyword : oxygen-ion implantation


High-Performance Small-Scale Collector-Up AlGaAs/GaAs HBT's with a Carbon-Doped Base Fabricated Using Oxygen-Ion Implantation
Shoji YAMAHATA Yutaka MATSUOKA Tadao ISHIBASHI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/09/25
Vol. E77-C  No. 9 ; pp. 1437-1443
Type of Manuscript:  Special Section PAPER (Special Issue on Heterostructure Devices and Epitaxial Growth Techniques)
Category: 
Keyword: 
heterojunction bipolar transistorcollector-up structurecarbon-doped baseoxygen-ion implantationmaximum oscillation frequency
 Summary | Full Text:PDF

Fabrication of Small AlGaAs/GaAs HBT's for lntegrated Circuits Using New Bridged Base Electrode Technology
Takumi NITTONO Koichi NAGATA Yoshiki YAMAUCHI Takashi MAKIMURA Hiroshi ITO Osaake NAKAJIMA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/09/25
Vol. E77-C  No. 9 ; pp. 1455-1463
Type of Manuscript:  PAPER
Category: Semiconductor Materials and Devices
Keyword: 
heterojunction bipolar transistorself-aligned structureoxygen-ion implantationzinc diffusioncarbon doping
 Summary | Full Text:PDF